GIGAPHOTON Shipped New Model Light Source “GT45A” for ArF Dry Lithogra…

GIGAPHOTON INC. (Head Office: Oyama, Tochigi; President and CEO: Katsumi Uranaka), a manufacturer of light sources used in semiconductor lithography, has announced that new model light source “GT45A” for ArF dry lithography tool had been shipped in August 2019. State-of-the-art semiconductor manufacturing processes involve 10/7 nm (nanometer) technology nodes, and with the introduction of EUV light sources, further advancing to 7nm and beyond are attracting attention for the future. On th...